Patterning Growth of Carbon Nanotube Forests on Metal Electrodes
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Reaction engineering/Process system
● The density of carbon nanotube (CNT) forests on metal electrodes tends to be lower than that on insulators, and patterning growth with small scale was difficult.
● Patterning growth of dense CNT forests on metal electrodes was demonstrated combining with conventional lithographies (UV lithography or e-beam lithography).
● The direct growth of CNT forests on metal electrodes by chemical vapor deposition (CVD) realized the low contact resistance between the CNT forests and the metal electrodes.
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