Patterning Growth of Carbon Nanotube Forests on Metal Electrodes

2018-1026-03
researcher's name
affiliation
research field
Reaction engineering/Process system
keyword

background

● The density of carbon nanotube (CNT) forests on metal electrodes tends to be lower than that on insulators, and patterning growth with small scale was difficult.

summary

● Patterning growth of dense CNT forests on metal electrodes was demonstrated combining with conventional lithographies (UV lithography or e-beam lithography).

predominance

● The direct growth of CNT forests on metal electrodes by chemical vapor deposition (CVD) realized the low contact resistance between the CNT forests and the metal electrodes.

material

  • Patterning growth of dense CNT forests by UV lithography.
  • Patterning growth of dense CNT forests by e-beam lithography.
posted: 2018/10/30