Vertically oriented graphite layers on diamond substrate

2016-0203-07
researcher's name
affiliation
research field
Electronic materials/Electric materials
keyword

background

● Necessary for electrode to conduct large current into power device materials
● Graphite have high in-plane electrical / thermal conductivity
● High density vertically oriented graphite will be useful for electrode

summary

● Implant ions to diamond (100) surface at high temperature
● Interstitial carbon atoms defuse to the diamond surface during the thermal treatment (1700oC, 2h) after implantation
● High density vertically oriented graphite layer was formed on diamond surface

predominance

● No additional process for device fabrication
● High density vertically oriented graphite layer have high electrical conductivity
● Graphite sheets are well connected to diamond substrate

application/development

● Electrode for diamond implanted region
● Carbon electrode with high density catalyst storing

material

  • Schematic image of vertically aligned graphite layers on (100) diamond
  • Cross-sectional TEM image of vertically aligned graphite layers on (100) diamond
  • Diamond MOSFET structure with vertically oriented graphite contact layers

collaborative researchers

INABA, Masafumi Part-time Lecturer

posted: 2016/02/03