Operation of 3-D MEMS micro mirror by single superposed driving signal
2020-1124-03
- researcher's name
- affiliation
- research field
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Nano/Microsystems,Intelligent mechanics/Mechanical systems,Intelligent robotics
- keyword
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background
● MEMS micro mirrors have been widely used for optical devices such as projectors and endoscopes
● Requirement for three-dimensional (3-D) scanning by MEMS micro mirror in addition to 1-D or 2-D scanning
● Increase in device size due to increase in driving direction
● Requirement for three-dimensional (3-D) scanning by MEMS micro mirror in addition to 1-D or 2-D scanning
● Increase in device size due to increase in driving direction
summary
● By single driving apparatus, MEMS micro mirror is actuated in three resonant modes
● MEMS micro mirror is operated in 3-D by single superposed signal with the three resonant frequencies
● MEMS micro mirror is operated in 3-D by single superposed signal with the three resonant frequencies
predominance
● Miniaturization of whole device by single driving apparatus and single driving signal
application/development
● Optical device that acquires 3-D images such as an endoscope and retinal projector
same researcher's seeds
posted:
2020/12/17
