Operation of 3-D MEMS Micro Mirror by Single Superposed Driving Signal

2017-0223-04
researcher's name
affiliation
research field
Nano/Microsystems,Intelligent mechanics/Mechanical systems,Intelligent robotics
keyword

background

● MEMS micro mirrors have been widely used for optical devices such as projectors and endoscopes
● Requirement for three-dimensional (3-D) scanning by MEMS micro mirror in addition to 1-D or 2-D scanning
● Increase in device size due to increase in driving direction

summary

● By single driving apparatus, MEMS micro mirror is actuated in  three resonant modes
● MEMS micro mirror is operated in 3-D by single superposed signal with the three resonant frequencies  

predominance

● Miniaturization of whole device by single driving apparatus and single driving signal

application/development

● Optical device that acquires 3-D images such as an endoscope and retinal projector 

material

  • 3-D MEMS micro mirror
  • Resonant frequencies and modes of MEMS micro mirror
  •  
posted: 2017/02/23