Mold manufacturing method and the molds formed using the method
- researcher's name
- affiliation
- research field
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Nano/Microsystems,Functional solid state chemistry,Electron device/Electronic equipment
- patent name
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Mold manufacturing method and the molds formed using the method
summary
This invention provides an electrolytic thick-film metal mold with the feature that the adhesive force between the electroless nickel (Ni) plated film formed on the self-assembled film and the inorganic thin film on the substrate is greater than 10MPa and less than 50MPa. Embedding is also possible with nano-sized patterns and the shapes of three-dimensional structures.
collaborative inventors
SAITO, Mikiko Senior Researcher (Research Council (Research Organization) Institute for Nanoscience & Nanotechnology) (retired)
same researcher's seeds
posted:
2014/04/03