Vertically oriented graphite layers on diamond substrate

2016-0203-07

researcher's name: about researcher KAWARADA, Hiroshi Professor (retired)
affiliation: Faculty of Science and Engineering School of Fundamental Science and Engineering
research field: Electronic materials/Electric materials
keyword

background

● Necessary for electrode to conduct large current into power device materials
● Graphite have high in-plane electrical / thermal conductivity
● High density vertically oriented graphite will be useful for electrode

summary

● Implant ions to diamond (100) surface at high temperature
● Interstitial carbon atoms defuse to the diamond surface during the thermal treatment (1700oC, 2h) after implantation
● High density vertically oriented graphite layer was formed on diamond surface

predominance

● No additional process for device fabrication
● High density vertically oriented graphite layer have high electrical conductivity
● Graphite sheets are well connected to diamond substrate

application/development

● Electrode for diamond implanted region
● Carbon electrode with high density catalyst storing

material

Schematic image of vertically aligned graphite layers on (100) diamond
Cross-sectional TEM image of vertically aligned graphite layers on (100) diamond
Diamond MOSFET structure with vertically oriented graphite contact layers

collaborative researchers

INABA, Masafumi Part-time Lecturer (retired)

same researcher's seeds

posted: 2016/02/03