Method for Producing Fine Pattern

researcher's name
research field
Device related chemistry,Nanobioscience,Electronic materials/Electric materials
patent name
Method for Producing Fine Pattern


This method is used when obtaining a pattern plating film of a soft magnetic thin film using an electroless plating bath. Pattern plating is obtained by adding a trace amount of an organic additive to the electroless plating bath, stirring the plating bath as appropriate, removing impurities from the bath, and thereby, improving selective precipitation properties.
posted: 2014/04/03